BEOL-compatible monolithic integration of property-tunable complex oxide single crystals on Si for advancing the more-than-Moore paradigm
Year: 2026
Type: article
Abstract: Complex oxide single-crystal thin films offer diverse functionalities essential for advancing the More-than-Moore paradigm in semiconductor technology. However, their direct integration with Si-based complementary metal–oxide–semiconductor (CMOS) circuits remains challenging due to thermal budget constraints and the difficulty of applying oxide-engineering techniques—such as strain, interface, and domain engineering—for tailoring properties on silicon. In this work, we demonstrate room-temperature monolithic integration of complex oxides onto silicon by combining epitaxial lift-off and surface-activated metal bonding, effectively overcoming thermal limitations. This method allows the application of oxide-engineering methodologies on silicon substrates, as demonstrated using ferromagnetic SrRuO 3 and ferroelectric Pb(Mg,Nb)O 3 -Pb(Zr,Ti)O 3 . Moreover, we highlight its practical potential through the fabrication of flexible ferroelectric heterostructures and electrically-controllable energy storage devices with a one-transistor, one-capacitor structure. This integration strategy facilitates the incorporation of emergent oxide functionalities into CMOS via back-end-of-line (BEOL) processes, bridging complex oxide science with silicon technology for advancing the More-than-Moore paradigm.
Source: Materials Today
Authors: Min-Seok Kim, Ruiguang Ning, Keun Young Huh, Bong Ho Kim, Sang Won An, Haneul Choi, Jun Woo Choi, Jun Young Lee, Byeong-hyeon Lee, So-Min Song, Jin Soo Park, Soo Young Jung, Hyung-Jin Choi, Dong-Hun Han, Jae-Hoon Han, Jin Dong Song, Donghee Park, Chong-Yun Kang, Sunghoon Hur, Sung Ok Won, Ho Won Jang, June Hyuk Lee, Ho-Yong Lee, Hye Jung Chang, Sang Mo Yang, Tae Heon Kim, Sanghyeon Kim, Byung Chul Lee, Seung-Hyub Baek
Institutions: Seoul National University, Korea Institute of Science and Technology, Korea University of Science and Technology, Korea University, Korean Association Of Science and Technology Studies, Korea Advanced Institute of Science and Technology, Korea Atomic Energy Research Institute, Sogang University, Advanced Institute of Convergence Technology, Sun Moon University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $6,070
OpenAlex ID: W4414253957