Nanometer inspection by deep-ultraviolet reflective Fourier ptychographic microscopy
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3063518
Authors: VAN HUAN PHAM, Byong Hyuk Chon, Hee Kyung Ahn
Institution: Korea Research Institute of Standards and Science
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414264676
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