Integrated curvilinear OPC and SRAF optimization through reinforcement learning
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3071663
Authors: Shilong Zhang, Youngsoo Shin
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414274599
