Work

3D strain field reconstruction by inversion of dynamical scattering

Year: 2025

Type: article

Abstract: Strain governs not only the mechanical response of materials but also their electronic, optical, and catalytic properties. For this reason, the measurement of the 3D strain field is crucial for a detailed understanding and for further development of material properties through strain engineering. However, measuring strain variations along the electron beam direction has remained a major challenge for (scanning-) transmission electron microscopy (S/TEM). In this article, we present a method for 3D strain field determination using 4D-STEM. The method is based on the inversion of dynamical diffraction effects, which occur at strain field variations along the beam direction. We test the method against simulated data with a known ground truth and demonstrate its application to an experimental 4D-STEM dataset from an inclined pseudomorphically grown Al0.47Ga0.53N layer.

Source: Applied Physics Letters

DOI: 10.1063/5.0274964

Authors: Laura Niermann, Tore Niermann, Chengyu Song, Colin Ophus

Institutions: Technische Universität Berlin, Lawrence Berkeley National Laboratory, Molecular Foundry, Stanford University

Language: English

Topic: Advanced Electron Microscopy Techniques and Applications

Subfield: Structural Biology

Field: Biochemistry, Genetics and Molecular Biology

Domain: Life Sciences

Open Access status: green