The effect of first contact polymer storage on xenon difluoride passivated lithium fluoride on aluminum films
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3065850
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414326020
FWCI:
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