Design and optimization of a novel diaphragm structure for MEMS piezoresistive pressure sensors
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3076890
Authors: Rongqiu Xue, Dongjing Liu, Zhenkai Liao, Miao Cai
Institution: Guilin University of Electronic Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414343710
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