Work

High-accuracy prediction of microcantilever sensor for fluid detection: simulation to deep learning

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ae0943

Authors: Roer Eka Pawinanto, Hasna Khoerunisa, Wira Hadi Kusuma, Wawan Purnama, Nurhidayatulloh, Muhammad Adli Rizqulloh, Resa Pramudita, Budi Mulyanti

Institution: Indonesia University of Education

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Universitas Pendidikan Indonesia

Award: G6855576566

OpenAlex ID: W4414362939

FWCI:

Cites: 41

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