Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0281351
Authors: Dong Yang, Xiaokun Wang, Zhenhua Zhou, Hanyang Li, Wenjin Zhang, Yongxin Liu, Julian Schulze, Peter Hartmann, Zoltán Donkó, Yangyang Fu
Institutions: Tsinghua University, Ruhr University Bochum, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Tsinghua Sichuan Energy Internet Research Institute, State Key Laboratory of Power System Operation and Control
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414408720