HiPIMS deposition method unlocks higher X-ray reflectance in ultra-short-period multilayer mirrors
Year: 2025
Type: article
Source: Optics Letters
DOI: 10.1364/ol.571400
Institutions: Centre National de la Recherche Scientifique, Université Paris-Saclay, Institut d’Optique Graduate School, Laboratoire Charles Fabry, Physikalisch-Technische Bundesanstalt, Federal Institute For Materials Research and Testing, European Synchrotron Radiation Facility, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA DAM Île-de-France
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414413519