Work

Improving uptime of clustered lithography tools by smart maintenance

Year: 2025

Type: conference-paper

Source: European Mask and Lithography Conference (EMLC)

DOI: 10.1117/12.3062124

Authors: Yvonne Bergmann, Huersen Deniz, Hansotto Kelp, Carolin Bier, Ralf Augke, Bernd Hammann

Institution: Robert Bosch (Germany)

Language: English

Topic: Reliability and Maintenance Optimization

Subfield: Safety, Risk, Reliability and Quality

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4414428951

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