Work

Analytical methods for SEM image enhancement: noise and charging effect reduction for precise contour extraction

Year: 2025

Type: conference-abstract

Source: European Mask and Lithography Conference (EMLC)

DOI: 10.1117/12.3063008

Authors: Mohamed Abaidi, XiaoChun Yang, Hawren Fang, Chris Clifford, Renyang Meng, Werner Gillijns

Institutions: Siemens (France), IMEC

Language: English

Topic: Image and Signal Denoising Methods

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414429013

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