Work

A step and repeat and roll-to-plate nanoimprint process for the fabrication of nanostructured substrates

Year: 2025

Type: conference-paper

Source: European Mask and Lithography Conference (EMLC)

DOI: 10.1117/12.3061906

Authors: Sonja Kopp, Viktorija Jonaityte, Michael J. Haslinger, Michael Mühlberger

Institution: PROFACTOR GmbH (Austria)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414429258

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