Year: 2025
Type: conference-paper
Abstract: MBM-2000C has been released in Q2 2025 for mature nodes. It is equipped with the writing modes to expose the main field with 3-5 hours and adequate writing accuracy. Writing modes can be switched seamlessly without re-calibration of beam to cover a wide range of mature nodes from 45 nm to 7 nm. MBM-2000C has the fidelity control function which allows the fine-tuning of the patterning resolution for pattern fidelity changing.
DOI: 10.1117/12.3066074
Authors: Issei Aibara, Masashi Uchiya, Shunji Isaji, Jumpei Yasuda, Hiroshi Matsumoto, Yoshinori Kojima, Masato Saito
Institution: Nuflare Technology, Inc. (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W4414429445
FWCI:
Cites:
Cited by:
Related to: