Work

Collaborative Scheduling of Start-up Transient Process for Cluster Tools with Equipment Front-End Module

Year: 2025

Type: conference-paper

Source: 2022 IEEE 18th International Conference on Automation Science and Engineering (CASE)

DOI: 10.1109/case58245.2025.11163803

Authors: Mingyao Li, Wenqing Xiong, Chunrong Pan

Institution: Jiangxi University of Science and Technology

Language: English

Topic: Scheduling and Optimization Algorithms

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: Jiangxi University of Science and Technology

OpenAlex ID: W4414432545

FWCI:

Cites: 23

Cited by:

Related to: