EUV source improvements for brightness and debris mitigation
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3071796
Authors: Shunichi Morimoto, Yoshihiro Takahata, Yusuke Teramoto, Fuki Sato, Akihisa Nagano, Noritaka Ashizawa, Soichiro Fujii, Hidenori Watanabe, Yoshihiko Sato
Institutions: Ushio (Japan), Ushio (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414433871
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