Numerical Investigation of Coupled Effects of Rotational Speed Difference and Growth Rate on VO x Defect Behavior in Czochralski Silicon
Year: 2025
Type: article
Source: Crystal Research and Technology
DOI: 10.1002/crat.70040
Authors: Qitao Zhang, Ai Wang, Tai Li, Peilin He, Yuwei Wang, Kaifeng Liao, Guoqiang Lv, Xingwei Yang, Wenhui Ma
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G7049471115, G7876037186
OpenAlex ID: W4414443591
