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Nanocrystalline Silicon EGFET Fabricated via R-ALILE Process for pH Sensing

Year: 2025

Type: article

Source: Journal of The Electrochemical Society

DOI: 10.1149/1945-7111/ae0b00

Authors: Jei-Li Hou, Yue-Xun Yu, Ting-Jen Hsueh

Institution: National Kaohsiung University of Science and Technology

Language: English

Topic: Analytical Chemistry and Sensors

Subfield: Bioengineering

Field: Chemical Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

OpenAlex ID: W4414460897

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Cites: 25

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