Work

Deposition of Silicon-Carbon Coatings by Electron Beam Evaporation of Silicon Carbide in an Oxygen-Containing Medium

Year: 2025

Type: article

Source: Inorganic Materials Applied Research

DOI: 10.1134/s2075113325701667

Authors: V. A. Burdovitsin, A. A. Andronov, L. J. Ngon A Kiki, F. A. Sukhovolsky

Institution: Tomsk State University of Control Systems and Radio-Electronics

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414491899

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Cites: 8

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