Work

A MEMS-Based On-Chip Scanning System for Compact Spectral Imaging: Design, Fabrication and Performance Evaluation

Year: 2025

Type: conference-paper

Source: International Conference on Electronics and Communication, Network and Computer Technology (ECNCT)

DOI: 10.1109/ecnct66493.2025.11172420

Authors: Leiying Zhai, Xinyu Yang

Institution: Liaoning Technical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414499653

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Cites: 8

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