Work

Effects of layer boundaries on x-ray reflectivity in thermally treated ternary gate dielectrics grown by atomic layer deposition

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004737

Authors: Jong-Hong Lu, Yen-Ho Chu, Liang-Pin Chou, Chung-Lin Huang, Wen-Lian Lee, Wen-Che Kuo, Pi-Chun Juan

Institutions: Ming Chi University of Technology, Chang Gung University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Hsinchu Science Park Bureau, Ministry of Science and Technology, Taiwan

Award: G310277087

OpenAlex ID: W4414512224

FWCI:

Cites: 43

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