Global model studies of species composition and chemical reactions in inductively coupled HBr/Cl 2 /Ar plasmas
Year: 2025
Type: article
Source: Plasma Science and Technology
Authors: Xingyu 星宇 CHEN 陈, Xinjie 欣杰 WANG 王, Jingyu 景毓 SUN 孙, Yuru 钰如 ZHANG 张, Fei 飞 GAO 高, Younian 友年 WANG 王
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1694248097, G4998678129, G7302644309
OpenAlex ID: W4414533801