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A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3550535

Authors: Ruihong Xiong, Xuankai Xu, Yiwei Wang, Jiawei Li, Fang Chen, Tao Wu

Institutions: ShanghaiTech University, Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Shanghai, National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G1828389722, G4540005756, 压电微机械超声探头声光成像应用, G5055577371

OpenAlex ID: W4414603040

FWCI: 0.225

Cites: 25

Cited by: 1

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