Work

Prediction model and experimental investigation of mid-spatial-frequency error in bonnet polishing of off-axis aspheric X-ray mirror

Year: 2025

Type: article

Abstract: As a sub-aperture technique in ultra-precision optical fabrication, bonnet polishing enables the production of optical components with high figure accuracy and superior surface quality. However, it can introduce periodic or aperiodic surface irregularities, known as mid-spatial-frequency (MSF) errors, which may compromise optical performance. This study examines the geometry, contact pressure, and motion velocity within the contact zone during bonnet polishing of off-axis aspheric X-ray mirrors and establishes the corresponding tool influence function. Based on the tool path parameters, a predictive model for MSF errors is developed to link the post-polishing surface profile characteristics with process parameters. The model is experimentally validated by evaluating the effects of varying velocity ratios and step intervals on MSF error generation. The results show that MSF errors decrease with increasing velocity ratio and decreasing step interval in raster polishing. The proposed model predicts MSF errors on the mirror surface with a maximum deviation of 12.37% relative to experimental measurements, providing a practical basis for suppressing MSF error formation in bonnet polishing processes.

Source: Optics Express

DOI: 10.1364/oe.577191

Authors: Ruipeng Qiu, Xiaoguang Guo, Yueming Deng, Shang Gao, Xuefei Wang

Institution: Dalian University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funder: National Natural Science Foundation of China