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ELECTRICAL CHARACTERISTICS OF RUTHENIUM LINES WITH A CROSS-SECTIONAL AREA LESS THAN 1000 nm

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.7868/s3034548025020048

Author: O.G. Glaz

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414690431

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