Work

Tutorial lecture : The chemistry of cryogenic etching

Year: 2025

Type: conference-paper

Abstract: International audience

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Dussart, Rémi, Tillocher, Thomas, Becerra, Loic, Lefaucheux, Philippe

Institution: Groupe de Recherches sur l'Energétique des Milieux Ionisés

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4414697217

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