Work

Grazing incidence and grazing exit X-ray fluorescence: principles, techniques, and applications for thin film and nanostructure analysis

Year: 2025

Type: article

Abstract: The grazing incidence – and grazing exit X-ray fluorescence techniques and their theoretical background are described with examples and a review of recent developments and applications is provided in this review.

Source: Journal of Analytical Atomic Spectrometry

DOI: 10.1039/d5ja00237k

Authors: Yves Kayser, Markus Krämer, Philipp Hönicke

Institutions: Physikalisch-Technische Bundesanstalt, Max Planck Institute for Chemical Energy Conversion, AXO Dresden (Germany), Helmholtz-Zentrum Berlin für Materialien und Energie

Language: English

Topic: X-ray Spectroscopy and Fluorescence Analysis

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: hybrid

Funders: Key Digital Technologies Joint Undertaking, European Partnership on Metrology, European Commission, Max-Planck-Gesellschaft, Helmholtz Association, Helmholtz-Zentrum Berlin für Materialien und Energie, HORIZON EUROPE Framework Programme

Awards: G1684937037, 14 Anstrom CMOS IC technology, G8922801171

OpenAlex ID: W4414705943

FWCI: 1.235

Cites: 183

Cited by: 2

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