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Design and fabrication of a SiC trench MOSFET with multi-step p-type shielding and multiple CSL layers

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Year: 2025
Type: conference-paper
Source: IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia)
DOI: 10.1109/wipda-asia63772.2025.11184042
Authors: Wei Chen, Fei Guo, Yangyang Wu, Kuan Wang, Zhijie Cheng, Jun Yuan, Rong Zhang, Guoqing Xin, Zhiqiang Wang
Institutions: Hubei Jiufengshan Laboratory, Huazhong University of Science and Technology
Language: English

Topic: Silicon Carbide Semiconductor Technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
SDG: Industry, innovation and infrastructure

Open Access status: closed
OpenAlex ID: W4414908877
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Cites: 13
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