Investigation of Electrical Property and Reliability in AlGaN/GaN MIS-HEMTs Fabricated by Using N 2 /O 2 Composite Plasma Treatment
Year: 2025
Type: conference-paper
Authors: Qingyuan Zuo, Huolin Huang, Yun Lei, Jiayu Zhang, Jianyu Zhao, Jianxun Dai
Institution: Dalian University of Technology
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4414909304
