Aberration-corrected beam scanning system based on cascaded metalens arrays [Invited]
Year: 2025
Type: article
Abstract: Metasurface-based beam steering devices offer a promising route toward high-speed scanning by enabling seamless integration with micro-electro-mechanical systems (MEMS). In this work, we propose a beam scanning system based on a cascaded metalens array. By employing a quadratic phase profile and the ray-tracing method, we optimize the phase distribution of the cascaded sub-lenses, achieving aberration-corrected beam steering. To validate the proposed design, we fabricate all-silicon geometric-phase metasurface samples and demonstrate a minimalist beam scanning system capable of achieving a scanning range of 20° × 20° and a scanning frequency up to 700 Hz. The demonstrated near-diffraction-limited beam control and fabrication-friendly design offer a new pathway toward the practical deployment of metasurface-based beam steering devices.
Source: Optical Materials Express
DOI: 10.1364/ome.573761
Authors: Haonan Zhang, Zhiwei Huang, Yiming Ma, Chen Lin, Yan Tong, Guoxing Zheng, Zile Li
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,843
Awards: G6760168318, G7320875889, G8378957876
OpenAlex ID: W4414948277