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High‐Fidelity and Large‐Area Transfer of Metal Thin Films for Precision Nanofabrication and Integration

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Year: 2025
Type: article
Source: Small Methods
DOI: 10.1002/smtd.202501588
Authors: Yawen Gan, Kaiqi Chen, Lizhou Yang, Renjing Xu, Yunda Wang
Institutions: The Hong Kong University of Science and Technology (Guangzhou), Hong Kong University of Science and Technology
Language: English

Topic: Nanofabrication and Lithography Techniques
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Department of Education of Guangdong Province, Guangzhou Municipal Science and Technology Bureau, Basic and Applied Basic Research Foundation of Guangdong Province
Awards: G2668538985, G4129072683, G5872884504, G7570894998, G8809822734
OpenAlex ID: W4414982818
FWCI: 0.469
Cites: 32
Cited by: 2
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