Work

Polygon-based unified Fourier-modal approach for diffractive-optics simulations

Year: 2025

Type: article

Abstract: In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the proposed approach against other computational theories and a synchrotron scattering experiment.

Source: Physical Review A

DOI: 10.1103/n2qj-l886

Authors: K. V. Nikolaev, V. Soltwisch, M. A. Botchev, A. Fernández Herrero, P. Hönicke, F. Scholze, S. N. Yakunin

Institutions: Moscow Institute of Physics and Technology, Kurchatov Institute, Physikalisch-Technische Bundesanstalt, Federal Institute For Materials Research and Testing, Keldysh Institute of Applied Mathematics

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

Funder: Russian Academy of Sciences

OpenAlex ID: W4414993303

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Cites: 37

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