Work

Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology

Year: 2025

Type: article

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.jmm.24.4.041406

Authors: Isaac W. Sanou, Julien Baderot, Vincent Barra, Ali Hallal, Léo Mazauric, Johann Foucher

Institutions: Centre National de la Recherche Scientifique, Université Clermont Auvergne, Clermont Auvergne INP

Language: English

Topic: Advanced Neural Network Applications

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: Région Auvergne-Rhône-Alpes

OpenAlex ID: W4415011049

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