Year: 2025
Type: article
Abstract: To increase semiconductor production yield and meet the growing global demand, air bearings offering higher processing speeds and reduced friction losses have been proposed as an ideal solution. However, due to the non-contact support characteristic of air bearings, challenges such as shaft displacement caused by processing resistance inevitably arise. As an engineering requirement, the shaft must restrict lateral deflection to within 30 μm under transverse force. In our previous research, a compensation system using a nozzle-flapper mechanism as a displacement sensor was proposed to address shaft displacement. The effectiveness of the nozzle-flapper system in measuring shaft displacement was validated at rotational speeds up to 20,000 rpm. Furthermore, the compensation system's ability to maintain the shaft's initial position under a 5 N external force was verified in related collaborative research. In this study, building upon prior work, we further analyze the system characteristics of the cylindrical nozzle-flapper. This includes modeling the geometric space formed by the specific shape of the cylindrical flapper and nozzle and proposing an airflow hypothesis based on this geometry. The hypothesis is incorporated into the theoretical model of a standard nozzle-flapper system, resulting in an optimized theoretical method applicable to cylindrical configurations. Experimental results validating the effectiveness of the proposed model are also presented.
Source: Micromachines
DOI: 10.3390/mi16101148
Authors: Peimin Xu, Kazuaki Inaba, Toshiharu Kagawa
Institution: Institute of Science Tokyo
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
Award: G4923174039
OpenAlex ID: W4415029307