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Wafer face shape control model based on automatic spindle inclination adjustment

Year: 2025

Type: article

Source: Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science

DOI: 10.1177/09544062251377628

Authors: Lihao Dai, Tianyu Li, Xianglong Zhu, Renke Kang, Zhigang Dong, Jiahui Xu, Meng Li

Institution: Dalian University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4415149862

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Cites: 26

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