Work

Modeling and Scheduling of Dual-Arm Cluster Tools With Multifunctional Process Modules

Year: 2025

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2025.3621092

Authors: Guanzhong Wu, Wenqing Xiong, Chunrong Pan

Institutions: Jiangxi University of Science and Technology, Nanchang University

Language: English

Topic: Scheduling and Optimization Algorithms

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Science Foundation, National Natural Science Foundation of China

Awards: G6968478175, G7317522462

OpenAlex ID: W4415178700

FWCI: 0.509

Cites: 56

Cited by: 1

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