Unsupervised Estimation of Lower Layer Pattern Regions Based on High Voltage-Scanning Electron Microscope Image Characteristics
Year: 2025
Type: article
Authors: Goshi Sasaki, Masayoshi Ishikawa, Sota Komatsu, Jun Chen
Institutions: Hitachi (Japan), Hitachi High-Tech (Japan)
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4415179159