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Enhancing Mechanical Stability of MEMS Resonator at Cryogenic Temperature Using Periodically Poled Thin Films

Year: 2025

Type: conference-paper

Source: IEEE International Ultrasonics Symposium

DOI: 10.1109/ius62464.2025.11201792

Authors: Junyan Zheng, Xingyu Liu, Zijun Ren, Kai Yang, Fangsheng Qian, Jiashuai Xu, Yansong Yang

Institution: Hong Kong University of Science and Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Innovation and Technology Commission

OpenAlex ID: W4415366660

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Cites: 22

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