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Frequency scaling capabilities of single layer LiNbO 3 film bulk acoustic resonators

Year: 2025

Type: conference-paper

Abstract: We investigate the capability of LiNbO3film bulk acoustic resonators to scale up in frequency through the selection of second and third order overtones. With the same piezoelectric layer thickness (300 nm), but different electrode thicknesses, resonators reach antiresonance frequencies of respectively 9, 10.1 and 12.1 GHz when considering fundamental mode, second overtone and third overtone longitudinal resonators. Electromechanical coupling factors of respectively 21%, 8% and 11% are obtained, indicating that satisfying electromechanical coupling factors can be reached without requiring complex structures such as periodically poled resonators. This offers promising perspectives towards further frequency scaling with thinner piezoelectric layers.

Source: IEEE International Ultrasonics Symposium

DOI: 10.1109/ius62464.2025.11201726

Authors: Alexandre Reinhardt, Gregory Enyedi, Pierre Perreau, Laurence Andreutti, Rachid Hida, Marie Bousquet

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: Centre National de la Recherche Scientifique

OpenAlex ID: W4415366963

FWCI:

Cites: 9

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