Work

Pop-down FBAR Structure for Thermal Stability without Sacrificing Coupling

Year: 2025

Type: conference-paper

Source: IEEE International Ultrasonics Symposium

DOI: 10.1109/ius62464.2025.11201665

Authors: Zijun Ren, Jiashuai Xu, Fangsheng Qian, Junyan Zheng, Xiaoya Duan, Xingyu Liu, Kai Yang, Chengjie Zuo, Haiding Sun, Yansong Yang

Institutions: Hong Kong University of Science and Technology, University of Science and Technology of China

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Innovation and Technology Commission

OpenAlex ID: W4415368038

FWCI: 2.791

Cites: 19

Cited by: 1

Related to: