Electron cumulative distribution function in a magnetron sputtering discharge
Year: 2025
Type: article
Source: Physical review. E
DOI: 10.1103/lh3s-yclm
Author: Mostafa Salahshoor
Institution: Iran University of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4415407805