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T4.1.4 - Ceramic MEMS Platforms for Metal Oxide Gas Sensors: Compatibility of Sensing Layers with Thick Film Materials

Year: 2025

Type: conference-paper

Abstract: The problem of the compatibility of the glass ceramic materials used in thick film technology and, in particular, in ceramic MEMS technology, with sensing layers (SnO 2 , TiO 2 , In 2 O 3 , ZnO) was studied in detail.It was demonstrated that long term operation at high working temperature (up to 450ºC) and, especially, technological annealing of the sensing element at temperature up to 750ºC leads to the dissolution of the glass components in the sensing layer.The application of such elements as Bi and Pb in the glass leads to the dramatic poisoning of the sensing layers.

Source: Lectures

DOI: 10.5162/eurosensors2025/t4.1.4

Authors: A. Vasiliev, O. Kul, A. Bolshakov, A. Mokrushin, A. Shaposhnik

Institutions: Dubna State University, NS Kurnakova Institute of General and Inorganic Chemistry, Voronezh State Agrarian University named after Emperor Peter the Great

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: Russian Science Foundation

Award: G7735082

OpenAlex ID: W4415688441

FWCI:

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