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M3.2.2 - Characterization of Sensor Responses in 1D and 2D Scan Patterns Via AlScN-Based MEMS Mirrors

Year: 2025

Type: conference-paper

Abstract: This paper presents an in-depth characterization of sensing capabilities using AlScN-based 3D-constructed MEMS mirror device.Generating 1D line scan or 2D Lissajous scan patterns while acquiring sensor signals simultaneously, this research investigated the correlation between scan angle and sensor output, as well as the potential applications in feedback control.

Source: Lectures

DOI: 10.5162/eurosensors2025/m3.2.2

Authors: J. -Y. Hwang, M. Shuvho, E. Yarar, G. Wille, F. Lofink, S. Gu-Stoppel, M. Shuvho, F. Lofink, F. Lofink

Institutions: Fraunhofer Institute for Silicon Technology, Christian-Albrechts-Universität zu Kiel

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: Ministry of Trade, Industry and Energy, Korea Institute for Advancement of Technology

OpenAlex ID: W4415688445

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