Work

M2.2.3 - High-resolution laser ablation of a copper layer for the fabrication of 3D-printed MEMS and microsensors

Year: 2025

Type: conference-paper

Abstract: This paper presents a novel method for structuring metallized layers on a polymer layer using laser ablation.The technique enables the fabrication of metallic tracks with a resolution of about 1 µm with minimal or no damage to the underlying polymer layer.It offers the flexibility required for complex 3Dprinted structures and overcomes the limitations of conventional approaches.It will provide an efficient alternative for MEMS fabrication.

Source: Lectures

Authors: M. Roig, D. Bourrier, P. -F. Calmon, C. Arvanitis, C. Bergaud, V. Mansard

Institutions: Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: Equipex, Agence Nationale de la Recherche, Centre National de la Recherche Scientifique

Awards: Investissements en NANOfabrication pour les nanotechnologies du FUTUR, Wireless system for intracranial pressure monitoring based on 3D-printed piezocapacitive sensor

OpenAlex ID: W4415688460

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