Work

Thermoelectric instability trends in argon radiofrequency plasmas

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004757

Authors: Omar Alsaeed, Benjamin T. Yee, Brett S. Scheiner, Chenhui Qu, Meenakshi Mamunuru, Tyler Kay, Amanda M. Lietz

Institutions: North Carolina State University, Lam Research (United States)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Lam Research

OpenAlex ID: W4415733345

FWCI: 0.231

Cites: 75

Cited by: 1

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