Work

Over 100 million Q silicon nitride Fabry–Perot Bragg nanoresonators enabled by advanced tapered gratings

Year: 2025

Type: article

Abstract: We report new advances in Fabry-Perot Bragg grating nanoresonators on low-loss silicon nitride (Si3N4). Building on a previous demonstration of an intrinsic quality factor Qin of 19.3 million with 1.4 dB/m propagation loss, we now achieve Qin up to 121 million on a 100-nm Si3N4 platform with an ultralow propagation loss of 0.19 dB/m. Even on a 300-nm Si3N4 platform, Qin of 58 million is obtained with 0.45 dB/m loss. Crucially, an advanced tapered grating design is introduced to minimize mode mismatch between the waveguide and Bragg mirror. These improvements pave the way for compact ultrahigh-Q photonic integrated resonators for applications in nonlinear optics and precision photonics.

Source: Optics Letters

DOI: 10.1364/ol.578449

Authors: Yang Zhang, Masoud Heidari Khouzani, ChengDao Yu, Sylvain Veilleux, Mario Dagenais

Institution: University of Maryland, College Park

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Funders: National Aeronautics and Space Administration, Defense Advanced Research Projects Agency, Division of Electrical, Communications and Cyber Systems

Awards: G2299640353, G3206637976, G829308243