Year: 2025
Type: article
Abstract: This study presents the fabrication and characterization of a MEMS-based hot arm actuator that utilizes Joule heating-induced thermal expansion for lateral displacement. The actuator was fabricated through a series of micro-fabrication processes including photolithography, e-beam evaporation, and plasma ashing. Electro-thermal and electro-thermo-mechanical characteristics were experimentally analyzed and compared with finite element analysis (FEA) simulations. The actuator demonstrated fast thermal response (~100 μs), high repeatability, and effective displacement (> 10 μm) under low-voltage operation (< 0.6 V). These findings highlight its potential application in fast-switching optical MEMS systems.
Source: Micro and Nano Systems Letters
Authors: Kibum Jung, Juhee Ko, Taeyeong Kim, Jungchul Lee
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,090
OpenAlex ID: W4415737162