Work

Study of the Multilayer Growth of Polysilicon Layers for Controlling the Deformation of Silicon Structures in the Chemical Vapor Transport Technology

Year: 2024

Type: article

Source: Semiconductors

DOI: 10.1134/s1063782625700022

Authors: D. V. Tarasov, E. M. Sokolov, S. A. Gavrilov

Institution: National Research University of Electronic Technology

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4415832913

FWCI: 0.103

Cites: 16

Cited by: 1

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