Analytical Design and Numerical Simulation of MEMS Piezoresistive Pressure Sensors with Stacked SiC and SiO2 Diaphragms for Realizing Enhanced Reliable Performance before Fabrication Forecasting Critical Performance Metrics in Resistant Environmental Conditions
Year: 2025
Type: article
Authors: Munikrishna Arunkumar, Sumit Kumar Jindal, Vikas Vijayvargiya
Institution: Vellore Institute of Technology University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4415835660