Year: 2025
Type: article
Abstract: High Resolution Image Download MS PowerPoint Slide Aluminum nitride (AlN) thin films with (0002) orientation have exceptional piezoelectric and optoelectronic properties for various applications. It remains challenging to grow highly oriented AlN films at low temperature (e.g., below 200 °C) using conventional magnetron sputtering. This study introduces a broad beam ion source-enhanced pulsed DC magnetron sputtering, which enables the growth of (0002) preferentially oriented polycrystalline AlN films at room temperature. The effects of the ion energy and ion flux on surface roughness, crystal orientation, and piezoelectric properties are systematically studied. The film crystallinity is significantly improved under an optimum ion energy; X-ray diffraction shows that the full width at half-maximum (FWHM) of the (0002) peak decreases from 0.7298 to 0.3751°. The average surface roughness is reduced from 2.65 to 0.95 nm. The effective piezoelectric d 33 eff value increases from 1.69 to 6.06 pm/V. These findings demonstrate that the ion beam facilitates crystal growth under nonthermal equilibrium conditions, offering significant advantages over conventional thin film growth.
Institutions: Michigan State University, Fraunhofer USA
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $4,500
Awards: Manufacturing of High-Efficiency Perovskite Solar Cells via Coupled Ion Source and Magnetron Discharges, MCA: Understanding cellulose synthase complex in planta using single molecule methods, Collaborative Research: SCH: A wireless optoelectronic implant for closed-loop control of bi-hormone secretion from genetically modified islet organoid grafts, Fiber-Optic Hot-Wire/Hot-Film Anemometers for Turbulence Measurement, Implantable Ultra-low Power VO2 MEMS Scanner based Surface-enhanced Raman Spectroscope for Wide-field Tumor Imaging in Free Moving Small Animals, CAREER: MOEMS-based Head-mounted NIR-II Microscopy for Molecular Imaging of Brain Tumor in Freely Behaving Small Animal Models, G6671297155, G8804066118
OpenAlex ID: W4415844792