Work

Atomic Understanding of the Formation Mechanism of Nanoscratches on the Surface of Indium Phosphide in Different Tool Directions

Year: 2025

Type: article

Source: Langmuir

DOI: 10.1021/acs.langmuir.5c03701

Authors: Zilei Bai, Jiayun Deng, Xiaoning Wen, Jiacheng Geng, Hua Wei, Hanbao Liu, Feng Qiu, Feng Hui

Institutions: Kunming University of Science and Technology, Xiangtan Electric Manufacturing Group (China), Yuyao Joywee Electrics (China), Yunnan University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Analysis and Testing Foundation of Kunming University of Science and Technology

Awards: G7593595892, G7675244516, G8306695895

OpenAlex ID: W4415917361

FWCI: 1.686

Cites: 55

Cited by: 7

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